![]() ![]() ![]() They employed both wet bulk silicon micromachining and surface micromachining techniques in the fabrication of integrated CMOS MEMS devices. Baltes and his coworkers at the Swiss Federal Institute of Technology, Zurich (ETH). In the research community, one of the pioneering efforts for CMOS MEMS transducers was made by H. One of the best-known commercial monolithic CMOS-MEMS devices is the digital micromirror device (DMD) manufactured by Texas Instruments. CMOS MEMS also refers to microfabrication technologies and processes that are involved in the creation of these integrated devices. ĬMOS MEMS are micromachined systems in which MEMS devices are integrated with CMOS circuitry on a single chip to enable miniaturization and performance improvement. Numerous microfabrication and integration approaches have been attempted. Integration of those subsystems into new materials such as silicon-on-insulators (SOI) has been attempted as well. In the last couple of decades, with breakthroughs in individual technologies and enabling tools, great efforts have been made to integrate MEMS structures with integrated circuits (IC) on a single CMOS substrate, for the so-called monolithic CMOS MEMS integration. The purpose of MEMS demands direct integration of mechanical structures with electronics that are normally fabricated by CMOS (complementary metal-oxide-semiconductor) technologies. The ultimate goals for MEMS have been and will continue to be continuous miniaturization, expanded functionalities, lower cost, and improved performance and reliability. The worldwide MEMS market is predicted to top 22 billion U.S. In the past few years, MEMS market has enjoyed consecutive double-digit growth. In other areas, MEMS are serving us in inkjet printers with MEMS print heads and portable electronics with MEMS resonators as frequency references, just to name a few. In automobiles, in addition to the well-known MEMS devices for vehicle performance and safety, such as pressure sensors for manifold intake vacuum measurement, smart tire pressure monitoring, accelerometers for airbag deployment, accelerometers and gyroscopes for electronic stability programs (ESP), inclinometer for sliding prevention, etc., MEMS have found new applications in environmental monitoring for driving and riding comfort and safety improvements. MEMS motion sensors, including accelerometers and gyroscopes with 6 degrees of freedom, along with MEMS microphones, pressure sensors, magnetometers, etc., have greatly contributed to the operation of the smart phone, which can be considered a little do-everything device. Probably the most popular gadget in which MEMS have significant applications, known or unknown to the user, is a smart phone. MEMS are now prevalent in our daily life. Last decade has seen the rapid maturity of the MEMS (micro-electro-mechanical systems) industry. ![]() Both competitive industrial products and state-of-the-art research results on CMOS MEMS are covered. Moreover, the incorporation of MEMS and CMOS is limited to monolithic integration, meaning wafer-bonding-based stacking and other integration approaches, despite their advantages, are excluded from the discussion. Due to the vast array of CMOS MEMS devices, this review focuses only on the most typical MEMS sensors and actuators including pressure sensors, inertial sensors, frequency reference devices and actuators utilizing different physics effects and the fabrication processes introduced. Introduction of associated devices follows the description of the respective CMOS MEMS technologies. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator) CMOS MEMS are introduced separately. This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. ![]()
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